技术档案
半导体过程控制Semiconductor process control
芯片制造缺陷检测与量测
每条都摘自下方编号的来源原文；只写事实，不写预测或建议。
已有应用
- KLA的8 Series图案晶圆检测系统以高吞吐量检测多种缺陷，用于快速识别及解决生产工艺问题。1
The 8 Series patterned wafer inspection systems detect a wide variety of defect types at very high throughput for fast identification and resolution of production process issues.
主要参与者
- KLA提供覆盖芯片制造环境各类良率应用的缺陷检测与复查系统。1
KLA's defect inspection and review systems cover the full range of yield applications within the chip manufacturing environment, including incoming process tool qualification, wafer qualification, research and development, and tool, process and line monitoring.