技术档案
氖气回收纯化Neon gas recovery and purification
回收废气并纯化氖气
每条都摘自下方编号的来源原文；只写事实，不写预测或建议。
技术简介
- 该工艺将制程废气收集到三罐系统，再由 TEMC 纯化至高纯度并回供三星。1
Waste gas from the manufacturing process is collected in a three-tank system and sent to TEMC, which refines it to high purity and supplies it back to Samsung.