技术档案
极紫外光刻Extreme ultraviolet lithography
用极紫外光打印芯片图形
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技术简介
- EUV打印芯片最复杂的层，其余层仍由DUV设备打印。3
EUV systems are used to print the most intricate layers on a chip, with the rest of the layers printed using various DUV systems.
主要参与者
- CNBC称ASML是全球唯一制造EUV光刻机的公司，台积电用其制造先进芯片。2
ASML is the only company in the world that produces extreme ultraviolet lithography machines, a key tool used by the likes of TSMC to make the world's most advanced semiconductors.
未定事项
- 2026年10月15日路透报道，ASML暂未接受2029和2030年订单，仍在评估客户准备程度及自身供货能力。1
Despite strong demand, ASML is holding off on accepting orders for 2029 and 2030 while it assesses both customers' readiness and its own ability to meet future demand.