技术档案

极紫外光刻EUV lithography

以极紫外光印制芯片图案

每条都摘自下方编号的来源原文;只写事实,不写预测或建议。

未定事项

  • ASML称EUV与DUV光刻还需要并行使用多年。1
    Both types of technology will be required in parallel for many years to come and we’re continuing to advance both technologies.

来源

  1. asml.com · ASML EUV lithography systems